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Surface reactions in silane discharges

TitleSurface reactions in silane discharges
Publication TypeBook Chapter
Year of Publication1988
AuthorsGallagher, AC
EditorPurić, J, Belić, DS
Book TitleThe physics of ionized gases: SPIG '86
Series TitleYugoslav Summer School and International Symposium on Physics of ions
Pagination229
Date Published05/1988
PublisherWorld Scientific Pub Co Inc
ISBN9971502925, 9789971502928