TY - JOUR
AU - Alan Gallagher
BT - MRS Proceedings
DA - 1986-01
DO - 10.1557/PROC-70-3
PY - 1986
SP - 3
EP - 10
T2 - MRS Proceedings
TI - Surface Reactions in Discharge and Cvd Deposition of Silane
VL - 70
ER -