TY - JOUR
AU - R. Robertson
AU - Alan Gallagher
BT - The Journal of Chemical Physics
DA - Jan-01-1986
DO - 10.1063/1.450933
PY - 1986
EP - 3623
T2 - The Journal of Chemical Physics
TI - Reaction mechanism and kinetics of silane pyrolysis on a hydrogenated amorphous silicon surface
VL - 85
SN - 00219606
ER -