TY - JOUR
AU - R. Robertson
AU - Alan Gallagher
BT - Journal of Applied Physics
DA - Jan-01-1986
DO - 10.1063/1.336806
PY - 1986
EP - 3402
T2 - Journal of Applied Physics
TI - Mono- and disilicon radicals in silane and silane-argon dc discharges
VL - 59
SN - 00218979
ER -