TY - JOUR
AU - H. Chatham
AU - Alan Gallagher
BT - Journal of Applied Physics
DA - Jan-01-1985
DO - 10.1063/1.335702
PY - 1985
EP - 159
T2 - Journal of Applied Physics
TI - Ion chemistry in silane dc discharges
VL - 58
SN - 00218979
ER -