TY - JOUR
AU - B. Yan
AU - J. Yang
AU - S. Guha
AU - Alan Gallagher
BT - MRS Proceedings
DA - Jan-01-1999
DO - 10.1557/PROC-557-115
PY - 1999
T2 - MRS Proceedings
TI - Analysis of Plasma Properties and Deposition of Amorphous Silicon Alloy Solar Cells Using Very High Frequency Glow Discharge
VL - 557
ER -