TY - CPAPER
AU - G. Bano
AU - K. Rozsa
AU - Alan Gallagher
CY - Durban (South Africa)
DO - 10.1063/1.1527749
PB - AIP
PP - Durban (South Africa)
PY - 2002
TI - Causes of Small Particle Growth in Silane Discharges
ER -