TY - JOUR
AU - Alan Gallagher
AU - A. Howling
AU - Ch. Hollenstein
BT - Journal of Applied Physics
DA - Jan-01-2002
DO - 10.1063/1.1459758
PY - 2002
EP - 5571
T2 - Journal of Applied Physics
TI - Anion reactions in silane plasma
VL - 91
SN - 00218979
ER -