TY - JOUR AU - D. Newell AU - Sam Richman AU - P. Nelson AU - R. Stebbins AU - Peter Bender AU - James Faller AU - J. Mason BT - Review of Scientific Instruments DA - Jan-01-1997 DO - 10.1063/1.1148269 PY - 1997 EP - 3211 T2 - Review of Scientific Instruments TI - An ultra-low-noise, low-frequency, six degrees of freedom active vibration isolator VL - 68 SN - 00346748 ER -