TY - JOUR
AU - B. Jelenković
AU - Alan Gallagher
BT - Journal of Applied Physics
DA - Jan-01-1997
DO - 10.1063/1.365955
PY - 1997
EP - 1546
T2 - Journal of Applied Physics
TI - Particle accumulation in a flowing silane discharge
VL - 82
SN - 00218979
ER -