TY - JOUR
AU - E. Molenbroek
AU - A. Mahan
AU - Alan Gallagher
BT - Journal of Applied Physics
DA - Jan-01-1997
DO - 10.1063/1.365998
PY - 1997
EP - 1909
T2 - Journal of Applied Physics
TI - Mechanisms influencing \textquotedbllefthot-wire\textquotedblright deposition of hydrogenated amorphous silicon
VL - 82
SN - 00218979
ER -