TY - JOUR
AU - N. Materer
AU - R. Goodman
AU - Stephen Leone
BT - Journal of Vacuum Science \& Technology A: Vacuum, Surfaces, and Films
DA - Jan-07-1997
DO - 10.1116/1.580619
PY - 1997
EP - 2134
T2 - Journal of Vacuum Science \& Technology A: Vacuum, Surfaces, and Films
TI - Laser single-photon ionization mass spectrometry measurements of SiCl and SiCl2 during thermal etching of Si(100)
VL - 15
SN - 07342101
ER -