TY - JOUR
AU - G. Weaver
AU - Stephen Leone
BT - Surface Science
DA - Jan-05-1995
DO - 10.1016/0039-6028(95)00035-6
PY - 1995
SP - 197
EP - 214
T2 - Surface Science
TI - Scattering of Cl2 beams from Si(100) for kinetic energies up to 2.6 eV: implications for sticking coefficients and reaction product formation
VL - 328
SN - 00396028
ER -