TY - JOUR
AU - Stephen Leone
BT - Japanese Journal of Applied Physics
DA - Jun-04-1997
DO - 10.1143/JJAP.34.2073
PY - 1995
SP - 2073
EP - 2082
T2 - Japanese Journal of Applied Physics
TI - Kinetic-Energy-Enhanced Neutral Etching
VL - 34
SN - 0021-4922
ER -