TY - JOUR
AU - John Doyle
AU - D. Doughty
AU - Alan Gallagher
BT - Journal of Applied Physics
DA - Jan-01-1992
DO - 10.1063/1.350669
PY - 1992
EP - 4771
T2 - Journal of Applied Physics
TI - Plasma chemistry in disilane discharges
VL - 71
SN - 00218979
ER -