TY - JOUR
AU - John Doyle
AU - D. Doughty
AU - Alan Gallagher
BT - Journal of Applied Physics
DA - Jan-01-1991
DO - 10.1063/1.348384
PY - 1991
EP - 4169
T2 - Journal of Applied Physics
TI - Germane discharge chemistry
VL - 69
SN - 00218979
ER -