TY - JOUR
AU - F. Campos
AU - G. Weaver
AU - C. Waltman
AU - Stephen Leone
BT - MRS Proceedings
DA - Jan-01-1991
DO - 10.1557/PROC-236-177
PY - 1991
SP - 177
EP - 182
T2 - MRS Proceedings
TI - Activation of the Si(100)/Cl2 Etching Reaction at High Cl2 Translational Energies
VL - 236
ER -