Imaging at the nanoscale is of great interest for applications in materials science, nanoscience\ and biology. The microscopy method developed in this thesis combines a tabletop coherent EUV/Xray\ source based on high harmonic generation, and an image-forming method based on coherent\ diffractive imaging. This microscopy method offers truly diffraction-limited resolution; however,\ previous work has been limited to thin, isolated samples in transmission mode. This thesis work\ extends this tool for imaging non-isolated samples, and for working in reflection mode to image\ surface features of thick samples. The quantitative phase information of the reflection image enables\ surface prolometry capability with sub-nanometer precision. The microscope developed in this\ work is also demonstrated to have hyperspectral capability with simultaneous multi-wavelength\ illumination, without the need for wavelength scanning or energy-resolved detectors. In the future,\ by taking advantage of the short-pulse nature of the high harmonic illumination, this microscope will\ be able to image nanoscale ultrafast dynamics with 10 femtosecond temporal resolution, openingthe door for imaging at the space-time limits.
CY - Boulder DA - 2015-02 N2 -Imaging at the nanoscale is of great interest for applications in materials science, nanoscience\ and biology. The microscopy method developed in this thesis combines a tabletop coherent EUV/Xray\ source based on high harmonic generation, and an image-forming method based on coherent\ diffractive imaging. This microscopy method offers truly diffraction-limited resolution; however,\ previous work has been limited to thin, isolated samples in transmission mode. This thesis work\ extends this tool for imaging non-isolated samples, and for working in reflection mode to image\ surface features of thick samples. The quantitative phase information of the reflection image enables\ surface prolometry capability with sub-nanometer precision. The microscope developed in this\ work is also demonstrated to have hyperspectral capability with simultaneous multi-wavelength\ illumination, without the need for wavelength scanning or energy-resolved detectors. In the future,\ by taking advantage of the short-pulse nature of the high harmonic illumination, this microscope will\ be able to image nanoscale ultrafast dynamics with 10 femtosecond temporal resolution, openingthe door for imaging at the space-time limits.
PB - University of Colorado Boulder PP - Boulder PY - 2015 EP - 119 TI - EUV Microscopy with a Tabletop High Harmonic Generation Source: Generalizing Coherent Di ractive Imaging to Extended Samples in Transmission, Reflection, and Hyperspectral Modalities VL - Ph.D. ER -