TY - JOUR
AU - M. Childs
AU - Alan Gallagher
BT - Journal of Applied Physics
DA - Jan-01-2000
DO - 10.1063/1.371982
PY - 2000
EP - 1076
T2 - Journal of Applied Physics
TI - Small particle growth in silane radio-frequency discharges
VL - 87
SN - 00218979
ER -