TY - CPAPER AU - P.-L. Yu AU - T. Purdy AU - Garrett Cole AU - Cindy Regal AB - We study methods to improve the Q of a variety of highly-stressed resonators for cavity optomechanics. We realize ultrahigh-Q metal/Si3N4 membranes and crystalline membranes, and have begun to control external dissipation via modified support structures. BT - CLEO CY - San Jose, California/Washington, D. C. DA - 2013-09 DO - 10.1364/CLEO_SI.2013.CW3F.8 N2 - We study methods to improve the Q of a variety of highly-stressed resonators for cavity optomechanics. We realize ultrahigh-Q metal/Si3N4 membranes and crystalline membranes, and have begun to control external dissipation via modified support structures. PB - OSA PP - San Jose, California/Washington, D. C. PY - 2013 EP - CW3F.8 T2 - CLEO TI - New Directions in High-Q Optomechanical Membrane Resonators UR - http://www.opticsinfobase.org/abstract.cfm?URI=CLEO_SI-2013-CW3F.8 ER -