TY - CPAPER
AU - Matthew Seaberg
AU - D. Adams
AU - Bosheng Zhang
AU - Dennis Gardner
AU - Margaret Murnane
AU - Henry Kapteyn
BT - SPIE
CY - San Jose, California
DA - 2012-01
DO - 10.1117/12.916524
PB - SPIE
PP - San Jose, California
PY - 2012
T2 - SPIE
TI - Ultrahigh 22-nm resolution EUV coherent diffraction imaging using a tabletop 13-nm high harmonic source
UR - http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1311014
ER -