TY - JOUR
AU - Alan Gallagher
BT - Physical Review E
DA - Jan-08-2000
DO - 10.1103/PhysRevE.62.2690
PY - 2000
SP - 2690
EP - 2706
T2 - Physical Review E
TI - Model of particle growth in silane discharges
VL - 62
SN - 1063-651X
ER -