TY - JOUR
AU - P. Horvath
AU - Alan Gallagher
BT - Journal of Applied Physics
DA - 01/2009
DO - 10.1063/1.3050331
PY - 2009
EP - 013304
T2 - Journal of Applied Physics
TI - Surface radicals in silane/hydrogen discharges
VL - 105
SN - 00218979
ER -