TY - JOUR
AU - D. Wilson
AU - Cindy Regal
AU - S. Papp
AU - H. Kimble
BT - Physical Review Letters
DA - 2009-09
DO - 10.1103/PhysRevLett.103.207204
PY - 2009
EP - 207204
T2 - Physical Review Letters
TI - Cavity Optomechanics with Stoichiometric SiN Films
VL - 103
SN - 0031-9007
ER -