TY - JOUR AU - Elizabeth Mirowski AU - Stephen Leone BT - Journal of Crystal Growth DA - Jan-11-2000 DO - 10.1016/S0022-0248(00)00760-0 PY - 2000 SP - 368 EP - 378 T2 - Journal of Crystal Growth TI - Enhancement in the crystalline quality of palladium silicide films: multiple versus single deposition VL - 219 SN - 00220248 ER -