TY - JOUR
AU - Damir Kujundzic
AU - Alan Gallagher
BT - Journal of Applied Physics
DA - Jan-01-2006
DO - 10.1063/1.2168230
PY - 2006
EP - 033301
T2 - Journal of Applied Physics
TI - Particle growth in silane-hydrogen discharges
VL - 99
SN - 00218979
ER -