TY - JOUR AU - W. Zheng AU - Alan Gallagher BT - Thin Solid Films DA - Jan-04-2006 DO - 10.1016/j.tsf.2005.07.116 PY - 2006 SP - 21 EP - 25 T2 - Thin Solid Films TI - Hot wire radicals and reactions VL - 501 SN - 00406090 ER -