TY - JOUR KW - Atomic and Molecular Physics, and Optics AU - Nathan Brooks AU - Bin Wang AU - Iona Binnie AU - Michael Tanksalvala AU - Yuka Esashi AU - Joshua Knobloch AU - Quynh Nguyen AU - Brendan McBennett AU - Nicholas Jenkins AU - Guan Gui AU - Zhe University AU - Henry Kapteyn AU - Margaret Murnane AU - Charles Bevis AB - We demonstrate temporally multiplexed multibeam ptychography implemented for the first time in the EUV, by using a high harmonic based light source. This allows for simultaneous imaging of different sample areas, or of the same area at different times or incidence angles. Furthermore, we show that this technique is compatible with wavelength multiplexing for multibeam spectroscopic imaging, taking full advantage of the temporal and spectral characteristics of high harmonic light sources. This technique enables increased data throughput using a simple experimental implementation and with high photon efficiency. BT - Optics Express DA - 2022-08 DO - 10.1364/oe.458955 IS - 17 N2 - We demonstrate temporally multiplexed multibeam ptychography implemented for the first time in the EUV, by using a high harmonic based light source. This allows for simultaneous imaging of different sample areas, or of the same area at different times or incidence angles. Furthermore, we show that this technique is compatible with wavelength multiplexing for multibeam spectroscopic imaging, taking full advantage of the temporal and spectral characteristics of high harmonic light sources. This technique enables increased data throughput using a simple experimental implementation and with high photon efficiency. PB - Optica Publishing Group PY - 2022 EP - 30331 T2 - Optics Express TI - Temporal and spectral multiplexing for EUV multibeam ptychography with a high harmonic light source VL - 30 SN - 1094-4087 ER -