TY - JOUR
AU - Alan Gallagher
AU - G. Bano
AU - K. Rozsa
BT - Solar Energy Materials and Solar Cells
DA - Jan-07-2003
DO - 10.1016/S0927-0248(02)00432-4
PY - 2003
SP - 27
EP - 40
T2 - Solar Energy Materials and Solar Cells
TI - Particles in silicon deposition discharges
VL - 78
SN - 09270248
ER -