@article{8577,
  author = {Alan Gallagher},
  title = {Surface Reactions in Discharge and Cvd Deposition of Silane},
  year = {1986},
  journal = {MRS Proceedings},
  volume = {70},
  pages = {3-10},
  month = {1986-01},
  doi = {10.1557/PROC-70-3},
}