@article{8545, author = {R. Robertson and Alan Gallagher}, title = {Reaction mechanism and kinetics of silane pyrolysis on a hydrogenated amorphous silicon surface}, year = {1986}, journal = {The Journal of Chemical Physics}, volume = {85}, pages = {3623}, month = {Jan-01-1986}, issn = {00219606}, doi = {10.1063/1.450933}, }