@article{8282,
  author = {H. Chatham and Alan Gallagher},
  title = {Ion chemistry in silane dc discharges},
  year = {1985},
  journal = {Journal of Applied Physics},
  volume = {58},
  pages = {159},
  month = {Jan-01-1985},
  issn = {00218979},
  doi = {10.1063/1.335702},
}