@article{7662,
  author = {R. Robertson and D. Hils and H. Chatham and Alan Gallagher},
  title = {Radical species in argon-silane discharges},
  year = {1983},
  journal = {Applied Physics Letters},
  volume = {43},
  pages = {544},
  month = {Jan-01-1983},
  issn = {00036951},
  doi = {10.1063/1.94413},
}