@article{6755,
  author = {B. Yan and J. Yang and S. Guha and Alan Gallagher},
  title = {Analysis of Plasma Properties and Deposition of Amorphous Silicon Alloy Solar Cells Using Very High Frequency Glow Discharge},
  year = {1999},
  journal = {MRS Proceedings},
  volume = {557},
  month = {Jan-01-1999},
  doi = {10.1557/PROC-557-115},
}