@article{6642, author = {Sam Richman and J. Giaime and D. Newell and R. Stebbins and Peter Bender and James Faller}, title = {Multistage active vibration isolation system}, year = {1998}, journal = {Review of Scientific Instruments}, volume = {69}, pages = {2531}, month = {Jan-01-1998}, issn = {00346748}, doi = {10.1063/1.1148954}, }