@article{6611, author = {B. Nelson and Yueqin Xu and D. Williamson and Bolko Von Roedern and Alice Mason and Stephan Heck and A. Mahan and S. Schmitt and Alan Gallagher and John Webb and R. Reedy}, title = {Hydrogenated Amorphous Silicon Germanium Alloys Grown by the Hot-Wire Chemical Vapor Deposition Technique}, year = {1998}, journal = {MRS Proceedings}, volume = {507}, month = {Jan-01-1998}, doi = {10.1557/PROC-507-447}, }