@article{629,
  author = {Alan Gallagher and A. Howling and Ch. Hollenstein},
  title = {Anion reactions in silane plasma},
  year = {2002},
  journal = {Journal of Applied Physics},
  volume = {91},
  pages = {5571},
  month = {Jan-01-2002},
  issn = {00218979},
  doi = {10.1063/1.1459758},
}