@article{6170,
  author = {B. Jelenković and Alan Gallagher},
  title = {Particle accumulation in a flowing silane discharge},
  year = {1997},
  journal = {Journal of Applied Physics},
  volume = {82},
  pages = {1546},
  month = {Jan-01-1997},
  issn = {00218979},
  doi = {10.1063/1.365955},
}