@article{6144,
  author = {E. Molenbroek and A. Mahan and Alan Gallagher},
  title = {Mechanisms influencing \textquotedbllefthot-wire\textquotedblright deposition of hydrogenated amorphous silicon},
  year = {1997},
  journal = {Journal of Applied Physics},
  volume = {82},
  pages = {1909},
  month = {Jan-01-1997},
  issn = {00218979},
  doi = {10.1063/1.365998},
}