@article{6126,
  author = {N. Materer and R. Goodman and Stephen Leone},
  title = {Laser single-photon ionization mass spectrometry measurements of SiCl and SiCl2 during thermal etching of Si(100)},
  year = {1997},
  journal = {Journal of Vacuum Science \& Technology A: Vacuum, Surfaces, and Films},
  volume = {15},
  pages = {2134},
  month = {Jan-07-1997},
  issn = {07342101},
  doi = {10.1116/1.580619},
}