@article{5805, author = {A. Laracuente and M. Bronikowski and Alan Gallagher}, title = {Chemical vapor deposition of nanometer-size aluminum features on silicon surfaces using an STM tip}, year = {1996}, journal = {Applied Surface Science}, volume = {107}, pages = {11-17}, month = {Jan-11-1996}, issn = {01694332}, doi = {10.1016/S0169-4332(96)00514-4}, }