@article{5631,
  author = {Stephen Leone},
  title = {Kinetic-Energy-Enhanced Neutral Etching},
  year = {1995},
  journal = {Japanese Journal of Applied Physics},
  volume = {34},
  pages = {2073-2082},
  month = {Jun-04-1997},
  issn = {0021-4922},
  doi = {10.1143/JJAP.34.2073},
}