@article{4993,
  author = {John Doyle and D. Doughty and Alan Gallagher},
  title = {Plasma chemistry in disilane discharges},
  year = {1992},
  journal = {Journal of Applied Physics},
  volume = {71},
  pages = {4771},
  month = {Jan-01-1992},
  issn = {00218979},
  doi = {10.1063/1.350669},
}