@article{4675,
  author = {John Doyle and D. Doughty and Alan Gallagher},
  title = {Germane discharge chemistry},
  year = {1991},
  journal = {Journal of Applied Physics},
  volume = {69},
  pages = {4169},
  month = {Jan-01-1991},
  issn = {00218979},
  doi = {10.1063/1.348384},
}