@article{4592,
  author = {F. Campos and G. Weaver and C. Waltman and Stephen Leone},
  title = {Activation of the Si(100)/Cl2 Etching Reaction at High Cl2 Translational Energies},
  year = {1991},
  journal = {MRS Proceedings},
  volume = {236},
  pages = {177-182},
  month = {Jan-01-1991},
  doi = {10.1557/PROC-236-177},
}