@conference{3899, author = {Dennis Gardner and Christina Porter and Elisabeth Shanblatt and Giulia Mancini and Robert Karl and Michael Tanksalvala and Charles Bevis and Henry Kapteyn and Margaret Murnane and D. Adams}, title = {Spectroscopic imaging of buried layers in 2+1D via tabletop ptychography with high-harmonic EUV illumination}, year = {2016}, journal = {unknown}, month = {2016-01}, publisher = {SPIE}, address = {San Jose, California, United States}, url = {http://proceedings.spiedigitallibrary.org/proceeding.aspx?doi=10.1117/12.2220368}, doi = {10.1117/12.2220368}, }