@article{328,
  author = {M. Childs and Alan Gallagher},
  title = {Small particle growth in silane radio-frequency discharges},
  year = {2000},
  journal = {Journal of Applied Physics},
  volume = {87},
  pages = {1076},
  month = {Jan-01-2000},
  issn = {00218979},
  doi = {10.1063/1.371982},
}