@conference{3112, author = {Matthew Seaberg and D. Adams and Bosheng Zhang and Dennis Gardner and Margaret Murnane and Henry Kapteyn}, title = {Ultrahigh 22-nm resolution EUV coherent diffraction imaging using a tabletop 13-nm high harmonic source}, year = {2012}, journal = {SPIE}, month = {2012-01}, publisher = {SPIE}, address = {San Jose, California}, url = {http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1311014}, doi = {10.1117/12.916524}, }