@article{2955,
  keywords = {pfc},
  author = {P.-L. Yu and T. Purdy and Cindy Regal},
  title = {Control of Material Damping in High-Q Membrane Microresonators},
  year = {2012},
  journal = {Physical Review Letters},
  volume = {108},
  chapter = {083603},
  pages = {083603/1-5},
  month = {2012-02},
  url = {http://link.aps.org/doi/10.1103/PhysRevLett.108.083603},
  doi = {10.1103/PhysRevLett.108.083603},
}