@article{2480,
  author = {P. Horvath and Alan Gallagher},
  title = {Surface radicals in silane/hydrogen discharges},
  year = {2009},
  journal = {Journal of Applied Physics},
  volume = {105},
  pages = {013304},
  month = {01/2009},
  issn = {00218979},
  doi = {10.1063/1.3050331},
}